Patents/Assignees

TOKYO ELECTRON LIMITED

1,902 patents in portfolio

US11761704utility2023
Inspection Apparatus and Inspection Method
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US11762011utility2023
Temperature Adjustment Method for Mounting Base, Inspection Device, and Mounting Base
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US11752515utility2023
Coating Apparatus and Coating Method
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US11752576utility2023
Substrate Processing System for Removing Peripheral Portion of Substrate, Substrate Processing Method and Computer Readable Recording Medium Thereof
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US11753719utility2023
Flow Rate Control Method, Flow Rate Control Device, and Film Forming Apparatus
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US11753720utility2023
Film Forming Apparatus, Source Supply Apparatus, and Film Forming Method
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US11756767utility2023
Plasma Processing Apparatus and Plasma Processing Method
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US11756769utility2023
Plasma Processing Apparatus
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US11756774utility2023
Plasma Processing Apparatus
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US11756790utility2023
Method for Patterning a Dielectric Layer
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US11756806utility2023
Heater Power Feeding Mechanism
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US11756807utility2023
Power Feeding Mechanism and Method for Controlling Temperature of a Stage
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US11756808utility2023
Plasma Processing Apparatus
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US11756836utility2023
3D Device Layout and Method Using Advanced 3D Isolation
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US11745231utility2023
Cleaning Method and Processing Apparatus
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US11749511utility2023
Plasma Observation System and Plasma Observation Method
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US11749508utility2023
Plasma Processing Method
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US11749503utility2023
Processing Method and Plasma Processing Apparatus
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US11749530utility2023
Method of Removing Phosphorus-doped Silicon Film and System Therefor
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US11747733utility2023
Freeze-less Methods for Self-aligned Double Patterning
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