- US12072625utility2024Nozzle Unit, Liquid Treatment Apparatus, and Liquid Treatment Method0 cites
- US12072693utility2024Analysis Device and Analysis Method0 cites
- US12074009utility2024Apparatus for Processing a Substrate0 cites
- US12074043utility2024Transfer Device and Teaching Method of Robot Arm0 cites
- US12074390utility2024Parallel Resonance Antenna for Radial Plasma Control0 cites
- US12075537utility2024Control Method of Inspection Apparatus and Inspection Apparatus0 cites
- US12074048utility2024Substrate Processing Apparatus and Substrate Processing Method0 cites
- US12068208utility2024Plasma Processing Apparatus and Control Method0 cites
- US12068205utility20243D High Density Compact Metal First Approach for Hybrid Transistor Designs Without Using Epitaxial Growth0 cites
- US12068175utility2024Substrate Processing Apparatus, Mixing Method, and Substrate Processing Method0 cites
- US12068171utility2024Method for Etching Oxide Semiconductor Film and Plasma Processing Apparatus0 cites
- US12068143utility2024Temperature Adjustment Method0 cites
- US12068139utility2024Plasma Processing Apparatus0 cites
- US12065732utility2024Film Forming Method and Film Forming Apparatus0 cites
- US12065182utility2024Trolley and Method for Supporting Component of Substrate Processing Apparatus0 cites
- US12068662utility2024Rotary Mechanism and Substrate Processing Apparatus0 cites
- US12062522utility2024Plasma Etching Method and Plasma Etching Apparatus0 cites
- US12062569utility2024Processing Apparatus and Processing Method0 cites
- US12061226utility2024Support Device, Test System, and Method of Controlling Support Device0 cites
- US12060641utility2024Film Forming Method and Film Forming Apparatus0 cites