- US12087599utility2024Substrate Processing Apparatus and Apparatus Cleaning Method0 cites
- US12087640utility2024High Density Logic Formation Using Multi-dimensional Laser Annealing0 cites
- US12087817utility2024High Performance 3D Vertical Transistor Device Enhancement Design0 cites
- US12083553utility2024Substrate Processing Method, Recording Medium, and Substrate Processing Apparatus0 cites
- US12084765utility2024Processing Apparatus and Processing Method0 cites
- US12076820utility2024Substrate Processing Apparatus and Substrate Processing Method0 cites
- US12077392utility2024Substrate Transfer Apparatus and Substrate Transfer Method0 cites
- US12077848utility2024Vacuum Processing Apparatus0 cites
- US12077855utility2024Cleaning Method and Film Deposition Apparatus0 cites
- US12077865utility2024Film Forming Method and Film Forming Apparatus0 cites
- US12078670utility2024Method of Detecting Failure of Antiparallel Thyristor, and Power Control Device0 cites
- US12080552utility2024Method of Depositing Silicon Film and Film Deposition Apparatus0 cites
- US12080517utility2024Ignition Method and Plasma Processing Apparatus0 cites
- US12080521utility2024Plasma Processing Method0 cites
- US12080523utility2024Vacuum Processing Apparatus and Method for Controlling Vacuum Processing Apparatus0 cites
- US12080572utility2024Substrate Processing Apparatus0 cites
- US12080599utility2024Methods for Forming Self-aligned Contacts Using Spin-on Silicon Carbide0 cites
- US12070769utility2024Liquid Processing Apparatus and Liquid Processing Method0 cites
- US12070820utility2024Processing Apparatus and Processing Method0 cites
- US12071687utility2024Plasma Processing Method and Plasma Processing Apparatus0 cites