- US12257611utility2025Cleaning Jig, Coating Apparatus, and Cleaning Method0 cites
- US12261209utility2025Replacement Channel 2D Material Integration0 cites
- US12261078utility2025Processing Method and Processing Apparatus0 cites
- US12261025utility2025Plasma Processing Apparatus0 cites
- US12261064utility2025Tank, Substrate Processing Apparatus, and Method of Using the Tank0 cites
- US12261060utility2025Substrate Processing Apparatus and Stage Cleaning Method0 cites
- US12261054utility2025Substrate Processing with Material Modification and Removal0 cites
- US12261053utility2025Substrate Processing with Selective Etching0 cites
- US12261030utility2025Normal-incidence In-situ Process Monitor Sensor0 cites
- US12261028utility2025Plasma Processing Apparatus0 cites
- US12261027utility2025Plasma Processing Apparatus and Plasma Processing Method0 cites
- US12261024utility2025Plasma Processing Apparatus and Cleaning Method0 cites
- US12261020utility2025Plasma Processing Apparatus and Plasma Processing Method0 cites
- US12261017utility2025Resonant Antenna for Physical Vapor Deposition Applications0 cites
- US12260548utility2025Abnormality Detection Apparatus and Abnormality Detection Method0 cites
- US12260544utility2025Image Restriction Method, Recording Medium, Information Processing Apparatus, and Support System0 cites
- US12259419utility2025Test Device and Probe Polishing Method0 cites
- US12255092utility2025Substrate Processing Apparatus0 cites
- US12255082utility2025Substrate Processing Method0 cites
- US12256471utility2025Apparatus for Heating Substrate and Method Thereof0 cites