Patents/Assignees

TOKYO ELECTRON LIMITED

1,902 patents in portfolio

US12362212utility2025
Computer-readable Recording Medium, Substrate Bonding System, and Substrate Bonding Method
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US12362208utility2025
Inspection Method and Etching System
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US12362202utility2025
Substrate Processing Method and Substrate Processing Apparatus
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US12362158utility2025
Method for OES Data Collection and Endpoint Detection
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US12362156utility2025
Substrate Processing Method and Substrate Processing Apparatus
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US12362155utility2025
Substrate Processing Apparatus, Temperature Control Method of Substrate Processing Apparatus, and Program of Control Device for Controlling Substrate Processing Apparatus
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US12362145utility2025
Plasma Processing Apparatus and Plasma Processing Method
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US12362144utility2025
Plasma Processing Apparatus and Method for Controlling Source Frequency of Source Radio-frequency Power
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US12362143utility2025
Plasma Processing Apparatus and Plasma Processing Method
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US12362142utility2025
Plasma Processing Method and Substrate Processing Apparatus
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US12362151utility2025
Plasma Processing Apparatus and Plasma Processing Method
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US12360463utility2025
Fiber Bundle Based Optical Spot Size Selector
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US12358016utility2025
Cup, Liquid Processing Apparatus, and Liquid Processing Method
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US12359302utility2025
Film Deposition Apparatus and Film Deposition Method
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US12356706utility2025
Methods for Forming High Performance Three Dimensionally Stacked Transistors Based on Dielectric Nano Sheets
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US12351905utility2025
Film Forming Method and Film Forming Apparatus
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US12356508utility2025
Heater Temperature Control Method, Heater, and Placement Stand
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US12354898utility2025
Stage, Testing Apparatus, and Stage Operating Method
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US12354991utility2025
Replacement Buried Power Rail in Backside Power Delivery
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US12354849utility2025
Plasma Processing Apparatus
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