Patents/Assignees

Nuflare Technology, Inc.

104 patents in portfolio

US11804360utility2023
Multi Charged Particle Beam Adjustment Method, Multi Charged Particle Beam Irradiation Method, and Multi Charged Particle Beam Irradiation Apparatus
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US11804361utility2023
Charged Particle Beam Writing Method, Charged Particle Beam Writing Apparatus, and Computer-readable Recording Medium
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US11789372utility2023
Writing Data Generating Method and Multi Charged Particle Beam Writing Apparatus
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US11791125utility2023
Aberration Corrector
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US11774860utility2023
Writing Data Generating Method, Multi Charged Particle Beam Writing Apparatus, Pattern Inspecting Apparatus, and Computer-readable Recording Medium
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US11756766utility2023
Charged Particle Beam Writing Apparatus and Charged Particle Beam Writing Method
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US11749491utility2023
Electron Beam Writing Apparatus and Cathode Life Span Prediction Method
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US11749499utility2023
Data Generation Method and Charged Particle Beam Irradiation Device
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US11749525utility2023
Vapor Phase Growth Apparatus and Vapor Phase Growth Method
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US11740546utility2023
Multi Charged Particle Beam Writing Apparatus and Method of Adjusting Same
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US11721520utility2023
Semiconductor Device, Multi-charged-particle Beam Writing Apparatus, and Multi-charged-particle Beam Exposure Apparatus
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US11694868utility2023
Multi-beam Image Acquisition Apparatus and Multi-beam Image Acquisition Method
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US11688058utility2023
Pattern Inspection Apparatus and Pattern Inspection Method
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US11664191utility2023
Electron Beam Irradiation Apparatus and Electron Beam Irradiation Method
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US11658002utility2023
Charged Particle Beam Adjustment Method, Charged Particle Beam Drawing Method, and Charged Particle Beam Irradiation Apparatus
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US11621140utility2023
Multiple Electron Beam Writing Apparatus and Multiple Electron Beam Writing Method
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US11605523utility2023
Aberration Corrector and Multiple Electron Beam Irradiation Apparatus
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US11574797utility2023
Multiple-charged Particle-beam Irradiation Apparatus and Multiple-charged Particle-beam Irradiation Method
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US11574793utility2023
Aberration Corrector and Multiple Electron Beam Irradiation Apparatus
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US11569057utility2023
Pattern Inspection Apparatus and Pattern Outline Position Acquisition Method
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