Patents/Assignees

Nuflare Technology, Inc.

104 patents in portfolio

US11562878utility2023
Method for Controlling Operation of Electron Emission Source, Electron Beam Writing Method, and Electron Beam Writing Apparatus
0 cites
US11556061utility2023
Multiple Charged Particle Beam Writing Apparatus and Multiple Charged Particle Beam Writing Method
0 cites
US11556114utility2023
Drawing Apparatus and Drawing Method
0 cites
US11545339utility2023
Multi-charged Particle Beam Writing Apparatus, and Multi-charged Particle Beam Writing Method
0 cites

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