Patents/Assignees

Nuflare Technology, Inc.

104 patents in portfolio

US12105026utility2024
Image Acquisition Method and Image Acquisition Apparatus
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US12106928utility2024
Cathode Mechanism of Electron Emission Source, and Method for Manufacturing Cathode Mechanism of Electron Emission Source
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US12087543utility2024
Multi-charged Particle Beam Writing Apparatus, and Multi-charged Particle Beam Writing Method
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USD1037186design2024
Susceptor Ring
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US12046445utility2024
Electron Beam Inspection Apparatus and Electron Beam Inspection Method
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US12046447utility2024
Multi-charged-particle-beam Writing Method, Multi-charged-particle-beam Writing Apparatus, and Computer-readable Recording Medium
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US12009174utility2024
Drawing Apparatus and Deflector
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US12009175utility2024
Charged Particle Beam Writing Apparatus
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US11995817utility2024
Defect Inspection Method
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US11961703utility2024
Multiple Electron-beam Image Acquisition Apparatus and Multiple Electron-beam Image Acquisition Method Using Beam Arrangement with Omitted Corners in a Scan Direction
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US11961708utility2024
Charged Particle Beam Writing Apparatus, Charged Particle Beam Writing Method, and a Non-transitory Computer-readable Storage Medium
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US11942305utility2024
Data Generation Method, Charged Particle Beam Irradiation Device, and Computer-readable Recording Medium
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USD1016761design2024
Top Plate for Semiconductor Manufacturaing Equipment
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US11915902utility2024
Conduction Inspection Method for Multipole Aberration Corrector, and Conduction Inspection Apparatus for Multipole Aberration Corrector
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US11908659utility2024
Multi Charged Particle Beam Writing Apparatus
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US11901156utility2024
Multi-charged-particle-beam Writing Apparatus and Multi-charged-particle-beam Writing Method
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US11869746utility2024
Multi-beam Writing Method and Multi-beam Writing Apparatus
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US11854764utility2023
Charged Particle Beam Writing Device and Charged Particle Beam Writing Method
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US11837429utility2023
Blanking Aperture Array Unit
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US11837436utility2023
Waveform Generating Device, Waveform Generating Method, and Charged Particle Beam Irradiation Apparatus
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