- US12410517utility2025Divertless Gas-dosing0 cites
- USD1091491design2025Debubbler Component0 cites
- US12406852utility2025Profile Optimization for High Aspect Ratio Memory Using an Etch Front Metal Catalyst0 cites
- US12406872utility2025Semiconductor Processing Chamber with Dual-lift Mechanism for Edge Ring Elevation Management0 cites
- USD1090468design2025Debubbler Component0 cites
- US12397435utility2025Substrate Location Detection and Adjustment0 cites
- US12398464utility2025Substrate Pedestal Including Backside Gas-delivery Tube0 cites
- US12400837utility2025Macroscopic Texturing for Anodized and Coated Surfaces0 cites
- US12400842utility2025Method of Cleaning Chamber Components with Metal Etch Residues0 cites
- US12400880utility2025Apparatuses for Uniform Fluid Delivery in a Multi-station Semiconductor Processing Chamber0 cites
- US12400902utility2025Carrier Ring Designs for Controlling Deposition on Wafer Bevel/edge0 cites
- US12401338utility2025Multiple-output Radiofrequency Matching Module and Associated Methods0 cites
- US12392047utility2025Byproduct Removal from Electroplating Solutions0 cites
- US12392049utility2025Controlling Plating Electrolyte Concentration on an Electrochemical Plating Apparatus0 cites
- US12394598utility2025Capacitance Measurement Without Disconnecting from High Power Circuit0 cites
- US12394601utility2025Impedance Transformation in Radio-frequency-assisted Plasma Generation0 cites
- US12394603utility2025Multizone Gas Distribution Plate for Trench Profile Optimization0 cites
- US12394608utility2025Cleaning System for Removing Deposits from Pump in an Exhaust of a Substrate Processing System0 cites
- US12387909utility2025Low Frequency RF Generator and Associated Electrostatic Chuck0 cites