Patents/Assignees

Lam Research Corporation

562 patents in portfolio

US12435418utility2025
Removable Showerhead Faceplate for Semiconductor Processing Tools
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US12435965utility2025
Wafer State Detection
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US12436464utility2025
Pre-exposure Photoresist Curing to Enhance EUV Lithographic Performance
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US12437974utility2025
Solenoid Bank with Standby Solenoid Valves for Controlling Pneumatic Valves of a Substrate Processing System
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US12437995utility2025
Tin Oxide Films in Semiconductor Device Manufacturing
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US12437966utility2025
Systems and Methods for Reverse Pulsing
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US12431349utility2025
In-situ Control of Film Properties During Atomic Layer Deposition
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USD1094488design2025
Manifold for Supplying Coolant to Components of Substrate Processing Systems
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US12421602utility2025
Multi-station Semiconductor Processing with Independently Adjustable Pedestals
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US12424410utility2025
RF Pulsing Within Pulsing for Semiconductor RF Plasma Processing
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US12424453utility2025
Low Temperature Direct Copper-copper Bonding
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US12424470utility2025
Systems and Methods for Autonomous Process Control and Optimization of Semiconductor Equipment Using Light Interferometry and Reflectometry
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US12424480utility2025
Detecting Wafer Status in a Wafer Chuck Assembly
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US12417902utility2025
Method for Cleaning a Chamber
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US12417916utility2025
Tin Oxide Films in Semiconductor Device Manufacturing
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US12417943utility2025
Reducing Intralevel Capacitance in Semiconductor Devices
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US12412736utility2025
Methods and Systems for Managing Byproduct Material Accumulation During Plasma-based Semiconductor Wafer Fabrication Process
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US12412742utility2025
Impurity Reduction in Silicon-containing Films
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US12410521utility2025
Bidirectional Indexing Apparatus
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US12410519utility2025
Automated Showerhead Tilt Adjustment
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