Manifold for Supplying Coolant to Components of Substrate Processing Systems

FIG. 1 is a perspective view of a manifold for supplying coolant to components of substrate processing systems;

FIG. 2 is a front view of the manifold shown in FIG. 1 ;

FIG. 3 is a back view of the manifold shown in FIG. 1 ;

FIG. 4 is a top view of the manifold shown in FIG. 1 ;

FIG. 5 is a bottom view of the manifold shown in FIG. 1 ;

FIG. 6 is a left side view of the manifold shown in FIG. 1 ; and,

FIG. 7 is a right side view of the manifold shown in FIG. 1 .

The dash-dash broken lines in the drawings illustrate portions of the article that form no part of the claimed design.