Patents/Inventors

Miguel Benjamin Vasquez

Portland, ORUS3 patents

4 Patents

USD10944882025
Manifold for Supplying Coolant to Components of Substrate Processing Systems
LAM RESEARCH CORPORATION
0 cites
US123622062025
Foreline Assembly for Quad Station Process Module
LAM RESEARCH CORPORATION
0 cites
US123476482025
Filter Box for a Substrate Processing System
Lam Research Corporation
0 cites
US119903602024
Electrostatic Chuck (ESC) Pedestal Voltage Isolation
Lam Research Corporation
0 cites