Patents/Assignees

Lam Research Corporation

562 patents in portfolio

US12542259utility2026
Plasma-exclusion-zone Rings for Processing Notched Wafers
0 cites
US12535454utility2026
Leveling Compound Control
0 cites
US12537178utility2026
Integrated Hardware-software Computer Vision System for Autonomous Control and Inspection of Substrate Processing Systems
0 cites
US12538747utility2026
Frontside and Backside Pressure Monitoring for Substrate Movement Prevention
0 cites
US12530021utility2026
Performance Predictors for Semiconductor-manufacturing Processes
0 cites
US12531208utility2026
Low Temperature Plasma Enhanced Chemical Vapor Deposition Process Including Preheated Showerhead
0 cites
US12531210utility2026
Edge Exclusion Control
0 cites
US12531220utility2026
Automated Feedforward and Feedback Sequence for Patterning CD Control
0 cites
US12532675utility2026
Core Removal
0 cites
US12532718utility2026
Improving Substrate Wettability for Plating Operations
0 cites
USD1107669design2025
Processing Chamber Purge Plate
0 cites
USD1107670design2025
Showerhead for a Substrate Processing System
0 cites
US12509772utility2025
Split Showerhead Cooling Plate
0 cites
US12510825utility2025
Photoresist Development with Halide Chemistries
0 cites
US12510826utility2025
Photoresist Development with Halide Chemistries
0 cites
US12512307utility2025
Profile Twisting Control in Dielectric Etch
0 cites
US12505985utility2025
Systems and Methods for Compensating for RF Power Loss
0 cites
US12505991utility2025
Tunability of Edge Plasma Density for Tilt Control
0 cites
US12507338utility2025
Matchless Plasma Source for Semiconductor Wafer Fabrication
0 cites
US12504692utility2025
Cyclic Development of Metal Oxide Based Photoresist for Etch Stop Deterrence
0 cites

← PreviousPage 4 of 29Next →