Showerhead for a Substrate Processing System

FIG. 1 is a top perspective view of a showerhead for a substrate processing system;

FIG. 2 illustrates left, right, front, and rear side views of the showerhead for the substrate processing system shown in FIG. 1 ;

FIG. 3 is a top view of the showerhead for the substrate processing system shown in FIG. 1 ;

FIG. 4 is a bottom view of the showerhead for the substrate processing system shown in FIG. 1 ; and,

FIG. 5 is an enlarged portion view of FIG. 4 showing gas through holes in dotted lines.

The dashed broken lines depict portions of the showerhead for a substrate processing system that form no part thereof.