Patents/Inventors

Daniel Boatright

Estacada, ORUS4 patents

3 Patents

USD11076702025
Showerhead for a Substrate Processing System
LAM RESEARCH CORPORATION
0 cites
US124008802025
Apparatuses for Uniform Fluid Delivery in a Multi-station Semiconductor Processing Chamber
Lam Research Corporation
0 cites
US117178662023
Etching Metal-oxide and Protecting Chamber Components
Lam Research Corporation
0 cites