Patents/Assignees

KOKUSAI ELECTRIC CORPORATION

328 patents in portfolio

US12451375utility2025
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Method of Processing Substrate Support
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US12435423utility2025
Substrate Processing Method, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-transitory Computer-readable Recording Medium
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US12435424utility2025
Raw Material Supply System, Substrate Processing Apparatus, and Method of Manufacturing Semiconductor Device
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US12435439utility2025
Substrate Processing Method, Method of Manufacturing Semiconductor Device, Non-transitory Computer-readable Recording Medium and Substrate Processing Apparatus
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US12437987utility2025
Processing Method, Method of Manufacturing Semiconductor Device, Processing Apparatus, and Recording Medium
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US12438013utility2025
Batch Type Vertical Substrate Processing Apparatus Comprising Cooling System Having Distributor Supplying Cooling Fluid to Plurality of First Coolers and Auxiliary System, and Supplying Merged Cooling Fluid to Second Cooler
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US12428729utility2025
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Non-transitory Computer-readable Recording Medium Storing Program
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US12431336utility2025
Method of Processing Substrate, Method of Manufacturing Semiconductor Device, Recording Medium, and Substrate Processing Apparatus
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US12421609utility2025
Method of Processing Substrate, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
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US12424409utility2025
Substrate Processing Apparatus, Substrate Processing Method, Method of Manufacturing Semiconductor Device, and Non-transitory Computer-readable Recording Medium
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US12424415utility2025
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-transitory Computer-readable Recording Medium
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US12424437utility2025
Processing Method, Method of Manufacturing Semiconductor Device, Processing Apparatus, and Recording Medium
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US12424463utility2025
Method of Processing Substrate, Method of Manufacturing Semiconductor Device, Substrate Processing System, and Recording Medium
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US12417049utility2025
Management Apparatus, Method of Processing Data, Recording Medium, Method of Manufacturing Semiconductor Device, and Processing System
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USD1091489design2025
Boat of Substrate Processing Apparatus
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US12406843utility2025
Method of Manufacturing Semiconductor Device, Method of Processing Substrate, Substrate Processing Apparatus, and Recording Medium
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US12398460utility2025
Substrate Processing Apparatus, Furnace Opening Assembly, Substrate Processing Method, Method of Manufacturing Semiconductor Device and Non-transitory Tangible Medium
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US12400840utility2025
Substrate Processing Apparatus, Substrate Holder, and Method of Manufacturing Semiconductor Device
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US12400855utility2025
Method of Processing Substrate, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
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US12400874utility2025
Processing Method, Method of Manufacturing Semiconductor Device, Processing Apparatus, and Recording Medium
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