Boat of Substrate Processing Apparatus

FIG. 1 is a front, top and right side perspective view of a boat of substrate processing apparatus showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof; and

FIG. 8 is an enlarged portion view of area FIG. 8 in FIG. 2 thereof;

FIG. 9 is a front, top and right side perspective view of the claimed portion indicated by the solid line in FIG. 8 thereof;

FIG. 10 is a front, bottom and right side perspective view of the claimed portion indicated by the solid line in FIG. 8 thereof;

FIG. 11 is a front elevational view of the claimed portion indicated by the solid line in FIG. 8 thereof;

FIG. 12 is a rear elevational view of the claimed portion indicated by the solid line in FIG. 8 thereof;

FIG. 13 is a left side elevational view of the claimed portion indicated by the solid line in FIG. 8 thereof;

FIG. 14 is a right side elevational view of the claimed portion indicated by the solid line in FIG. 8 thereof;

FIG. 15 is a top plan view of the claimed portion indicated by the solid line in FIG. 8 thereof; and,

FIG. 16 is a bottom plan elevational view of the claimed portion indicated by the solid line in FIG. 8 .

The dot-dashed lines define the bounds of the claimed design and form no part thereof. The dash-dash broken lines are included for the purpose of illustrating portions of the article that form no part of the claimed design. The dot-dot-dash broken lines in the FIGS. 2 and 8 depict the boundaries of the enlargements and form no part of the claimed design.