Patents/Assignees

KOKUSAI ELECTRIC CORPORATION

328 patents in portfolio

US12505989utility2025
Substrate Processing Apparatus, and Method of Manufacturing Semiconductor Device
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US12506002utility2025
Method of Manufacturing Semiconductor Device Using Plasma to Modify Surface of Silicon-containing Films Exposed in Trench Structure, and Recording Medium
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US12504332utility2025
Substrate Temperature Sensor, Substrate Retainer and Substrate Processing Apparatus
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US12497696utility2025
Gas Supply Structure and Substrate Processing Apparatus
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US12494363utility2025
Method of Processing Substrate, Method of Manufacturing Semiconductor Device, Recording Medium, and Substrate Processing Apparatus
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US12494364utility2025
Method of Manufacturing Semiconductor Device, Substrate Processing Method, Substrate Processing Apparatus, and Recording Medium
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US12492476utility2025
Substrate Processing Apparatus, Method of Processing Substrate, Method of Manufacturing Semiconductor Device, and Plasma Generation Device Preliminary
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US12488962utility2025
Substrate Processing Apparatus, Plasma Generating Apparatus, and Method of Manufacturing Semiconductor Device
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US12489010utility2025
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
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US12488999utility2025
Substrate Processing Apparatus, Cleaning Method, and Method of Manufacturing Semiconductor Device
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US12473648utility2025
Substrate Processing Apparatus, Substrate Processing Method, Method of Manufacturing Semiconductor Device and Non-transitory Computer-readable Recording Medium
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US12476129utility2025
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Recording Medium
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US12467689utility2025
Furnace Opening Structure, Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
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US12469707utility2025
Method of Manufacturing Semiconductor Device, Non-transitory Computer-readable Recording Medium and Substrate Processing Apparatus
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US12469713utility2025
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
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US12461507utility2025
Substrate Processing Apparatus, Substrate Processing Method, Semiconductor Device Manufacturing Method, and Control Program
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US12463017utility2025
Substrate Processing Apparatus, Plasma Light Emitting Apparatus and Method of Manufacturing Semiconductor Device
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US12463031utility2025
Method of Processing Substrate, Recording Medium, and Substrate Processing Apparatus
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US12456636utility2025
Heat Insulation Structure, Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Substrate Processing Method
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US12451360utility2025
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
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