Patents/Assignees

KOKUSAI ELECTRIC CORPORATION

328 patents in portfolio

US11753716utility2023
Method of Processing Substrate, Substrate Processing Apparatus, Recording Medium, and Method of Manufacturing Semiconductor Device
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US11749550utility2023
Method of Manufacturing Semiconductor Device by Setting Process Chamber Maintenance Enable State
0 cites
US11749510utility2023
Plasma Generating Device, Substrate Processing Apparatus, and Method of Manufacturing Semiconductor Device
0 cites
US11747789utility2023
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Recording Medium
0 cites
USD0997892design2023
End Effector for Handling Wafers
0 cites
US11746416utility2023
Method of Processing Substrate and Manufacturing Semiconductor Device by Forming Film Containing Silicon
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US11735442utility2023
Method of Operating Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
0 cites
US11735412utility2023
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
0 cites
US11726456utility2023
Substrate Processing System
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US11728162utility2023
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
0 cites
US11728165utility2023
Method of Processing Substrate, Substrate Processing Apparatus, Recording Medium, and Method of Manufacturing Semiconductor Device
0 cites
US11728183utility2023
Method of Manufacturing Semiconductor Device
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US11728159utility2023
Method of Manufacturing Semiconductor Device, Surface Treatment Method, Substrate Processing Apparatus, and Recording Medium
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USD0992762design2023
Protector for Maintenance on Semiconductor Manufacturing Equipments
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US11705325utility2023
Method of Processing Substrate, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
0 cites
US11705326utility2023
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
0 cites
US11699593utility2023
Method of Manufacturing Semiconductor Device, Substrate Processing Method, Substrate Processing Apparatus, and Recording Medium
0 cites
US11694907utility2023
Substrate Processing Apparatus, Recording Medium, and Fluid Circulation Mechanism
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US11685992utility2023
Substrate Processing Apparatus, Quartz Reaction Tube and Method of Manufacturing Semiconductor Device
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US11664217utility2023
Method of Manufacturing Semiconductor Device, Substrate Processing Method, Substrate Processing Apparatus, and Recording Medium
0 cites

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