Patents/Assignees

KOKUSAI ELECTRIC CORPORATION

328 patents in portfolio

US11848201utility2023
Method of Manufacturing Semiconductor Device, Recording Medium, and Substrate Processing Method
0 cites
US11846025utility2023
Substrate Processing Apparatus Capable of Adjusting Inner Pressure of Process Chamber Thereof and Method Therefor
0 cites
US11841343utility2023
Method of Processing Substrate, Substrate Processing Apparatus, Method of Manufacturing Semiconductor Processing Apparatus, and Recording Medium
0 cites
US11837466utility2023
Method of Manufacturing Semiconductor Device, Substrate Processing Method, Substrate Processing Apparatus, and Recording Medium
0 cites
US11837440utility2023
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Recording Medium
0 cites
US11827979utility2023
Cleaning Method, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
0 cites
US11827982utility2023
Processing Apparatus
0 cites
US11823946utility2023
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-transitory Computer-readable Recording Medium
0 cites
US11823886utility2023
Method of Manufacturing Semiconductor Device, Method of Processing Substrate, Substrate Processing Apparatus, and Recording Medium
0 cites
US11817314utility2023
Method of Processing Substrate, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
0 cites
US11814725utility2023
Method of Cleaning, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
0 cites
USD1003834design2023
Heat Insulator Cover of Semiconductor Manufacturing Apparatus
0 cites
US11810781utility2023
Method of Processing Substrate, Substrate Processing Apparatus, Recording Medium, Method of Manufacturing Semiconductor Device
0 cites
USD1003243design2023
Heat Insulator Cover of Semiconductor Manufacturing Apparatus
0 cites
US11804365utility2023
Substrate Processing Apparatus, Plasma Generating Apparatus, and Method of Manufacturing Semiconductor Device
0 cites
US11788188utility2023
Cleaning Method, Method of Manufacturing Semiconductor Device, and Substrate Processing Apparatus
0 cites
US11782425utility2023
Substrate Processing Apparatus, Method of Monitoring Abnormality of Substrate Processing Apparatus, and Recording Medium
0 cites
US11784044utility2023
Method of Processing Substrate, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
0 cites
US11761087utility2023
Substrate Processing Apparatus and Non-transitory Computer-readable Recording Medium
0 cites
US11764056utility2023
Method of Processing Substrate, Substrate Processing Apparatus, Recording Medium, Method of Manufacturing Semiconductor Device
0 cites

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