Patents/Assignees

KOKUSAI ELECTRIC CORPORATION

328 patents in portfolio

US11915927utility2024
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-transitory Computer-readable Recording Medium
0 cites
US11908682utility2024
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-transitory Computer-readable Recording Medium
0 cites
US11905596utility2024
Method of Manufacturing Semiconductor Device, and Recording Medium
0 cites
US11908737utility2024
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Recording Medium
0 cites
US11906367utility2024
Substrate Temperature Sensor, Substrate Retainer and Substrate Processing Apparatus
0 cites
US11898247utility2024
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-transitory Computer-readable Recording Medium
0 cites
US11894239utility2024
Method of Processing Substrate, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
0 cites
US11891697utility2024
Substrate Processing Apparatus
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US11885016utility2024
Method of Processing Substrate, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Recording Medium
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US11876010utility2024
Substrate Processing Apparatus and Recording Medium
0 cites
US11873555utility2024
Vaporizer, Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
0 cites
US11869764utility2024
Substrate Processing Apparatus, Substrate Processing Method and Non-transitory Computer-readable Recording Medium
0 cites
US11869785utility2024
Method of Manufacturing Semiconductor Device and Non-transitory Computer-readable Recording Medium
0 cites
US11869790utility2024
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Recording Medium
0 cites
US11869748utility2024
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
0 cites
US11866822utility2024
Vaporizer, Substrate Processing Apparatus, and Method of Manufacturing Semiconductor Device
0 cites
US11859280utility2024
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
0 cites
US11854799utility2023
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Non-transitory Computer-readable Recording Medium
0 cites
US11854850utility2023
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, Method of Loading Substrate and Non-transitory Computer-readable Recording Medium
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US11848203utility2023
Methods of Processing Substrate and Manufacturing Semiconductor Device by Forming Film, Substrate Processing Apparatus, and Recording Medium
0 cites

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