End Effector for Handling Wafers

FIG. 1 is a front, bottom and right side perspective view of an end effector for handling wafers showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a left side elevational view thereof;

FIG. 4 is a right side elevational view thereof;

FIG. 5 is a top plan view thereof;

FIG. 6 is a bottom plan view thereof;

FIG. 7 is a rear elevational view thereof;

FIG. 8 is a cross sectional view taken along line 8 - 8 in FIG. 2 ; and,

FIG. 9 is a cross sectional view taken along line 9 - 9 in FIG. 2 .

The broken lines are included for the purpose of illustrating portions of the article that form no part of the claimed design.