- US11986847utility2024Nozzle Installation Jig0 cites
- US11990347utility2024Method of Manufacturing Semiconductor Device0 cites
- US11978623utility2024Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium0 cites
- US11970771utility2024Vaporizer, Substrate Processing Apparatus and Method for Manufacturing Semiconductor Device0 cites
- US11965240utility2024Cleaning Method, Method of Manufacturing Semiconductor Device, and Substrate Processing Apparatus0 cites
- US11966210utility2024Substrate Processing Apparatus, Device Management Controller, and Recording Medium0 cites
- US11967490utility2024Plasma Generating Device, Substrate Processing Apparatus, and Method of Manufacturing Semiconductor Device0 cites
- US11967500utility2024Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium0 cites
- US11967501utility2024Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device0 cites
- US11967512utility2024Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device0 cites
- US11967513utility2024Substrate Processing Apparatus0 cites
- US11967534utility2024Method of Manufacturing Semiconductor Device0 cites
- USD1022904design2024Tubular Reactor0 cites
- USD1022905design2024Tubular Reactor0 cites
- USD1022906design2024Tubular Reactor0 cites
- USD1022907design2024Tubular Reactor0 cites
- USD1022933design2024Wafer Support of Semiconductor Manufacturing Apparatus0 cites