Patents/Assignees

KOKUSAI ELECTRIC CORPORATION

328 patents in portfolio

US12080550utility2024
Method of Manufacturing Semiconductor Device, Substrate Processing Method, Substrate Processing Apparatus, and Recording Medium
0 cites
US12080546utility2024
Method of Processing Substrate, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
0 cites
US12080555utility2024
Method of Manufacturing Semiconductor Device, Non-transitory Computer-readable Recording Medium and Substrate Processing Apparatus
0 cites
US12065736utility2024
Cleaning Method, Method of Manufacturing Semiconductor Device, and Substrate Processing Apparatus
0 cites
US12065741utility2024
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
0 cites
US12066815utility2024
Recipe Creation Method or Apparatus Utilizing a Series of Steps According to a Target Recipe File for Semiconductor Manufacturing or Substrating Processing
0 cites
US12068136utility2024
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Plasma Generator
0 cites
US12062546utility2024
Substrate Processing Device, Manufacturing Method for Semiconductor Device, and Reaction Tube
0 cites
US12053805utility2024
Method of Cleaning Member in Process Container, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
0 cites
US12050138utility2024
Substrate Processing Apparatus, and Thermocouple
0 cites
US12037677utility2024
Method of Manufacturing Semiconductor Device, Substrate Processing Method, Substrate Processing Apparatus, and Recording Medium
0 cites
US12040161utility2024
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
0 cites
US12040179utility2024
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
0 cites
US12033852utility2024
Method of Processing Substrate, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
0 cites
US12018373utility2024
Substrate Processing Apparatus
0 cites
US12014943utility2024
Method of Manufacturing Semiconductor Device and Non-transitory Computer-readable Recording Medium
0 cites
US12009201utility2024
Method of Processing Substrate, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
0 cites
US12000045utility2024
Method of Manufacturing Semiconductor Device, Non-transitory Computer-readable Recording Medium, Substrate Processing Apparatus and Substrate Processing Method
0 cites
US11996311utility2024
Substrate Processing Apparatus, Method of Processing Substrate, Method of Manufacturing Semiconductor Device, and Recording Medium
0 cites
US11996337utility2024
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Recording Medium
0 cites

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