Wafer Support of Semiconductor Manufacturing Apparatus

FIG. 1 is a front, top and right side perspective view of a wafer support of semiconductor manufacturing apparatus showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a right side elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a rear elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof;

FIG. 8 is a cross-sectional view taken along line 8 - 8 in FIG. 2 ; and,

FIG. 9 is an enlarged view taken from encircled portion labeled, “ 9 ,” in FIG. 8 .

The broken lines in FIGS. 8 and 9 define the boundary of the enlarged portion view of FIG. 9 and form no part of the claimed design.