Patents/Assignees

Gigaphoton Inc.

85 patents in portfolio

US11940736utility2024
Tin Trap Device, Extreme Ultraviolet Light Generation Apparatus, and Electronic Device Manufacturing Method
0 cites
US11924954utility2024
Extreme Ultraviolet Light Generation Apparatus and Electronic Device Manufacturing Method
0 cites
US11924955utility2024
Extreme Ultraviolet Light Generation Apparatus and Electronic Device Manufacturing Method
0 cites
US11870209utility2024
Laser System and Electronic Device Manufacturing Method
0 cites
US11862931utility2024
Laser System and Method for Manufacturing Electronic Devices
0 cites
US11841267utility2023
Energy Measuring Apparatus and Excimer Laser Apparatus
0 cites
US11837839utility2023
Optical Pulse Stretcher, Laser Device, and Electronic Device Manufacturing Method
0 cites
US11826852utility2023
Laser Processing Apparatus, Laser Processing System, and Laser Processing Method
0 cites
US11822324utility2023
Machine Learning Method, Consumable Management Apparatus, and Computer Readable Medium
0 cites
US11808629utility2023
Sensor Degradation Evaluation Method
0 cites
US11804697utility2023
Laser System and Electronic Device Manufacturing Method
0 cites
US11789374utility2023
Extreme Ultraviolet Light Generation Apparatus and Electronic Device Manufacturing Method
0 cites
US11784453utility2023
Laser System and Electronic Device Manufacturing Method
0 cites
US11778721utility2023
Extreme Ultraviolet Light Generation System and Electronic Device Manufacturing Method
0 cites
US11768362utility2023
Laser Radiation System and Method for Manufacturing Electronic Device
0 cites
US11764541utility2023
Laser System and Method for Manufacturing Electronic Device
0 cites
US11695248utility2023
Laser Device and Electronic Device Manufacturing Method
0 cites
US11682877utility2023
Laser System
0 cites
US11659646utility2023
Target Supply Device, Extreme Ultraviolet Light Generation Apparatus, and Electronic Device Manufacturing Method
0 cites
US11614572utility2023
Mirror for Extreme Ultraviolet Light and Extreme Ultraviolet Light Generating Apparatus
0 cites

← PreviousPage 4 of 5Next →