Patents/Assignees

Gigaphoton Inc.

85 patents in portfolio

US12224549utility2025
Line Narrowing Module, Gas Laser Apparatus, and Method for Manufacturing Electronic Devices
0 cites
US12216409utility2025
Exposure System, Laser Control Parameter Production Method, and Electronic Device Manufacturing Method
0 cites
US12207382utility2025
Target Supply System, Extreme Ultraviolet Light Generation Apparatus, and Electronic Device Manufacturing Method
0 cites
US12197132utility2025
Exposure System and Method for Manufacturing Electronic Devices
0 cites
US12185449utility2024
EUV Light Generation Apparatus, Electronic Device Manufacturing Method, and Inspection Method
0 cites
US12166329utility2024
High Voltage Pulse Generation Device, Gas Laser Apparatus, and Electronic Device Manufacturing Method
0 cites
US12160085utility2024
Laser System and Electronic Device Manufacturing Method
0 cites
US12155168utility2024
Line Narrowing Gas Laser Device and Electronic Device Manufacturing Method
0 cites
US12150233utility2024
Target Substance Replenishment Device, Extreme Ultraviolet Light Generation Apparatus, and Electronic Device Manufacturing Method
0 cites
US12140869utility2024
Line Narrowed Gas Laser Apparatus, Control Method Therefor, Electronic Device Manufacturing Method
0 cites
US12109648utility2024
Laser Annealing Apparatus and Method for Manufacturing Electronic Device
0 cites
US12111577utility2024
Line Narrowing Device, Electronic Device Manufacturing Method
0 cites
US12113326utility2024
Laser Device and Electronic Device Manufacturing Method
0 cites
US12105426utility2024
Line Narrowed Gas Laser Apparatus, Control Method Therefor, Electronic Device Manufacturing Method
0 cites
US12105425utility2024
Exposure Method, Exposure System, and Method for Manufacturing Electronic Devices
0 cites
US12076815utility2024
Laser Processing Apparatus and Method for Processing Workpiece
0 cites
US12068572utility2024
Narrowed-line Gas Laser Apparatus and Method for Manufacturing Electronic Devices
0 cites
US12038567utility2024
Pulse Width Expansion Apparatus and Electronic Device Manufacturing Method
0 cites
US11978997utility2024
Laser Apparatus and Electronic Device Manufacturing Method
0 cites
US11947263utility2024
Laser Chamber and Electronic Device Manufacturing Method
0 cites

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