Patents/Assignees

Gigaphoton Inc.

85 patents in portfolio

US12432839utility2025
Extreme Ultraviolet Light Generation Chamber Device and Electronic Device Manufacturing Method
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US12424813utility2025
Laser Device, Laser Control Method, and Electronic Device Manufacturing Method
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US12406889utility2025
Electronic Device Manufacturing Method
0 cites
US12401171utility2025
Laser Device, Laser Oscillation Method, and Electronic Device Manufacturing Method
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US12388228utility2025
Laser Device and Leak Check Method for Laser Device
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US12389508utility2025
Light Source Parameter Information Management Method, Light Source Parameter Information Management Apparatus, and Computer Readable Medium
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US12355204utility2025
Gas Laser Apparatus and Electronic Device Manufacturing Method
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US12347995utility2025
Chamber Device, Gas Laser Device, and Electronic Device Manufacturing Method
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US12341313utility2025
Gas Laser Apparatus, Laser Beam Emitting Method of Gas Laser Apparatus, and Electronic Device Manufacturing Method
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US12334700utility2025
Wavelength Conversion Apparatus, Solid-state Laser System, and Electronic Device Manufacturing Method
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US12334705utility2025
Laser Apparatus and Electronic Device Manufacturing Method
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US12332575utility2025
Target Supply System, Extreme Ultraviolet Light Generation Apparatus, and Electronic Device Manufacturing Method
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US12327975utility2025
Chamber Device, and Electronic Device Manufacturing Method
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US12309908utility2025
Extreme Ultraviolet Light Generation Apparatus and Electronic Device Manufacturing Method
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US12296403utility2025
Laser Processing Apparatus and Method for Processing Workpiece
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US12300962utility2025
Laser Device and Electronic Device Manufacturing Method
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US12283786utility2025
Gas Laser Apparatus and Electronic Device Manufacturing Method
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US12284745utility2025
Extreme Ultraviolet Light Generation Method, Extreme Ultraviolet Light Generation Apparatus, and Electronic Device Manufacturing Method
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US12244117utility2025
High-voltage Pulse Generator, Gas Laser Apparatus, and Method for Manufacturing Electronic Device
0 cites
US12237640utility2025
Line Narrowing Device and Electronic Device Manufacturing Method
0 cites

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