Patents/Assignees

Gigaphoton Inc.

85 patents in portfolio

US11604416utility2023
Laser Processing Method and Laser Processing System
0 cites
US11586032utility2023
Laser Apparatus and Extreme Ultraviolet Light Generation System
0 cites
US11588291utility2023
Laser Chamber Apparatus, Gas Laser Apparatus, and Method for Manufacturing Electronic Device
0 cites
US11553583utility2023
Extreme Ultraviolet Light Generation System and Electronic Device Manufacturing Method
0 cites
US8343429utility2013
Target Supply Unit of Extreme Ultraviolet Light Source Apparatus and Method of Manufacturing the Same
0 cites

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