Patents/Assignees

EBARA CORPORATION

289 patents in portfolio

US12046500utility2024
Transport Apparatus and Substrate Processing Apparatus
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USD1035468design2024
Measurement Jig
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US12036634utility2024
Substrate Processing Control System, Substrate Processing Control Method, and Program
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USD1034248design2024
Measurement Jig
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US12030092utility2024
Substrate Cleaning Method and Substrate Cleaning Apparatus
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US12033847utility2024
Cleaning Module, Substrate Processing Apparatus Including Cleaning Module, and Cleaning Method
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US12023777utility2024
Temperature Regulating Apparatus and Polishing Apparatus
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US12027402utility2024
Substrate Processing Apparatus and Substrate Processing Method
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US12017323utility2024
Polishing Head System and Polishing Apparatus
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US12020954utility2024
Substrate Processing Apparatus
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US12020976utility2024
Substrate Processing Apparatus and Method for Removing Substrate from Table of Substrate Processing Apparatus
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US12009234utility2024
Control System for Semiconductor Manufacturing
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US12002688utility2024
Substrate Cleaning Device and Substrate Cleaning Method
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US12002704utility2024
Substrate Holding Apparatus, Substrate Processing Apparatus Having Substrate Holding Apparatus, and Substrate Processing Method
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US11992915utility2024
System for Adjusting Pad Surface Temperature and Polishing Apparatus
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US11993861utility2024
Plating Apparatus and Air Bubble Removing Method
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US11996303utility2024
Substrate Cleaning Device and Substrate Cleaning Method
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US11980998utility2024
Polishing Device, Polishing Method, and Recording Medium for Recording Program for Determining Supply Position of Polishing Liquid
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US11975225utility2024
Drone System
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USD1024963design2024
Motor
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