Patents/Assignees

EBARA CORPORATION

289 patents in portfolio

US12110909utility2024
Vertical Multi-stage Pump
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USD1043388design2024
Vibration Sensor Case
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US12100587utility2024
Substrate Cleaning Apparatus and Cleaning Method of Substrate
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US12101073utility2024
Method for Determining a Cleanliness of a Cleaning Member
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US12094731utility2024
Substrate Drying Apparatus
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US12094754utility2024
Substrate Supporting Apparatus and Method of Controlling Substrate Supporting Apparatus
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US12083646utility2024
Polishing Apparatus, Polishing Method and Method for Outputting Visualization Information of Film Thickness Distribution on Substrate
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US12084288utility2024
Conveyance Abnormality Prediction System
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US12084783utility2024
Plating Apparatus and Rinse Process Method
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US12076760utility2024
Pre-wet Module, Deaerated Liquid Circulation System, and Pre-wet Method
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US12076830utility2024
Polishing Method and Polishing Apparatus
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US12076834utility2024
Eddy Current Sensor
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US12077875utility2024
Air Bubble Removing Method of Plating Apparatus and Plating Apparatus
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US12070638utility2024
Fire Fighting System Using Drone
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US12068189utility2024
Elastic Membrane, Substrate Holding Device, and Polishing Apparatus
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US12062563utility2024
Substrate Processing Apparatus, Substrate Processing System, and Substrate Processing Method
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US12053851utility2024
Jig and Installation Method Using Same Jig
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US12054840utility2024
Plating Apparatus, Pre-wet Process Method, and Cleaning Process Method
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US12054841utility2024
Apparatus for Plating and Method of Plating
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US12042901utility2024
Cleaning Liquid Supply Device, Cleaning Unit, and Storage Medium Storing Program
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