Patents/Assignees

EBARA CORPORATION

289 patents in portfolio

US12179312utility2024
Apparatus for Polishing, Processing System, and Method of Polishing
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US12180606utility2024
Plating Apparatus
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US12181345utility2024
Method of Calibrating Radiation Thermometer and System Thereof
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US12183642utility2024
Film-thickness Measuring Method, Method of Detecting Notch Portion, and Polishing Apparatus
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USD1054306design2024
Member of Battery Unit for Vibration Sensor
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US12163244utility2024
Method of Adjusting Plating Module
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USD1053220design2024
Impeller for Pumps
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US12157951utility2024
Plating Method, Insoluble Anode for Plating, and Plating Apparatus
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US12152311utility2024
Wetting Method for Substrate and Plating Apparatus
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US12152312utility2024
Plating Apparatus and Air Bubble Removing Method of Plating Apparatus
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US12154797utility2024
Substrate Processing Method and Substrate Processing Apparatus
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US12138734utility2024
Substrate Polishing Apparatus and Polishing Liquid Discharge Method in Substrate Polishing Apparatus
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US12140980utility2024
Apparatus for Supplying Liquid, Cleaning Unit, and Apparatus for Processing Substrate
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US12134833utility2024
Plating Apparatus and Cleaning Method of Contact Member of Plating Apparatus
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US12128449utility2024
Substrate Cleaning Device, Substrate Processing Apparatus, Break-in Device, Method for Estimating Number of Fine Particles Adhering to Substrate, Method for Determining Degree of Contamination of Substrate Cleaning Member, and Method for Determining Break-in Processing
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US12128523utility2024
Polishing Apparatus
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US12131923utility2024
Polishing Apparatus and Polishing Method
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US12123714utility2024
Output Signal Processing Circuit for Eddy Current Sensor and Output Signal Processing Method for Eddy Current Sensor
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US12116687utility2024
Powder Supply Apparatus and Plating System
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US12119246utility2024
Method, Device, and Non-transitory Computer Readable Medium for Determining Timing of Removing Substrate from Cassette in Substrate Processing Device, and Substrate Processing Device
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