Patents/Assignees

EBARA CORPORATION

289 patents in portfolio

US12257666utility2025
Surface Height Measurement Method Using Dummy Disk
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US12258673utility2025
Plating Apparatus
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US12251738utility2025
Method and Apparatus for Cleaning Washing Tool, Substrate Washing Device, and Method for Manufacturing Washing Tool
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US12247311utility2025
Plating Apparatus and Plating Process Method
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US12241738utility2025
Detection Signal Processing Apparatus and Detection Signal Processing Method for Eddy Current Sensor
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US12243710utility2025
Electron Beam Irradiation Apparatus with Overlapping Beam Columns and Helping Columns
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US12237194utility2025
Substrate Transporter and Substrate Processing Apparatus Including Substrate Transporter
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US12226825utility2025
Buffer Chamber and AM System Including a Buffer Chamber
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US12230529utility2025
Substrate Holding Apparatus, Substrate Suction Determination Method, Substrate Polishing Apparatus, Substrate Polishing Method, Method of Removing Liquid from Upper Surface of Wafer to Be Polished, Elastic Film for Pressing Wafer Against Polishing Pad, Substrate Release Method, and Constant Amount Gas Supply Apparatus
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US12220732utility2025
Substrate Cleaning System and Substrate Cleaning Method
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US12221712utility2025
Plating Apparatus
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US12221714utility2025
Plating Method and Plating Apparatus
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USD1060213design2025
Battery Unit Case for Vibration Sensor
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US12208428utility2025
Liquid Supplying Device and Method for Draining Liquid Thereof
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US12208488utility2025
Coupling Mechanism with Spherical Bearing, Method of Determining Bearing Radius of Spherical Bearing, and Substrate Polishing Apparatus
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US12211733utility2025
Substrate Processing Apparatus and Substrate Processing Method
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US12205831utility2025
Cleaning Apparatus and Polishing Apparatus
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USD1056841design2025
Motor
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US12191178utility2025
Semiconductor Manufacturing Apparatus, Failure Prediction Method for Semiconductor Manufacturing Apparatus, and Failure Prediction Program for Semiconductor Manufacturing Apparatus
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US12179310utility2024
Output Signal Processing Apparatus for Eddy Current Sensor
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