Patents/Assignees

EBARA CORPORATION

289 patents in portfolio

US12351933utility2025
Plating Method and Plating Apparatus
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US12351929utility2025
Plating Apparatus and Plating Method
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US12351932utility2025
Plating Process Method
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US12350787utility2025
Substrate Processing Apparatus
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US12351931utility2025
Plating Apparatus
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US12343770utility2025
Cleaning Device and Cleaning Method
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US12344954utility2025
Plating Apparatus
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US12347697utility2025
Prewet Module and Prewet Method
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US12337438utility2025
Break-in Processing Apparatus and Break-in Processing Method
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US12331420utility2025
Plating Apparatus and Plating Method
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US12325101utility2025
Polishing Apparatus and Polishing Method
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US12318881utility2025
Substrate Polishing Apparatus and Substrate Polishing Method
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US12322609utility2025
Substrate Processing Apparatus and Substrate Processing Method
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US12297555utility2025
Apparatus for Plating and Method of Controlling Apparatus for Plating
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US12285836utility2025
End Point Detection Method, Polishing Apparatus, and Polishing Method
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US12288707utility2025
Substrate Holder
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US12270120utility2025
Plating Apparatus and Plating Method
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US12271813utility2025
Method for Determining Optimal Number of Submodules for Use in Semiconductor Manufacturing Apparatus Including Substrate Processing Module Including Plurality of Submodules, and Semiconductor Manufacturing Apparatus
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US12263452utility2025
Gas Solution Supply Device
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US12264406utility2025
Plating Apparatus and Substrate Cleaning Method
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