Patents/Assignees

EBARA CORPORATION

289 patents in portfolio

US11969858utility2024
Substrate Processing Apparatus
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US11967508utility2024
Damper Control System and Damper Control Method
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US11958161utility2024
Polishing Apparatus Having Surface-property Measuring Device of Polishing Pad and Polishing System
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US11958163utility2024
Substrate Holding Apparatus, Elastic Membrane, Polishing Apparatus, and Method for Replacing Elastic Membrane
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USD1021832design2024
Elastic Membrane
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US11951588utility2024
Optical Film-thickness Measuring Apparatus and Polishing Apparatus
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US11945075utility2024
Polishing Apparatus and Polishing Member Dressing Method
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US11946470utility2024
Information Processing Apparatus, Information Processing System, Information Processing Method, Program, Substrate Processing Apparatus, Criterion Data Determination Apparatus, and Criterion Data Determination Method
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US11948811utility2024
Cleaning Apparatus and Polishing Apparatus
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US11948827utility2024
Substrate Support Mechanism, Substrate Cleaning Device and Substrate Processing Method
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US11926018utility2024
Apparatus for Polishing and Method of Polishing
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US11919048utility2024
Method of Cleaning an Optical Film-thickness Measuring System
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US11919124utility2024
Pad-temperature Regulating Apparatus, Method of Regulating Pad-temperature, Polishing Apparatus, and Polishing System
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US11911806utility2024
Substrate Cleaning Device, Abnormality Determination Method of Substrate Cleaning Device, Storage Medium
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US11911867utility2024
Polishing Apparatus and Polishing Method
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US11911868utility2024
Substrate Processing Apparatus, Substrate Processing Method, and Storage Medium That Stores Program to Cause Computer in Substrate Processing Apparatus to Execute Substrate Processing Method
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US11911872utility2024
Substrate Processing Apparatus and Substrate Processing Method
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US11913466utility2024
Pump and Rotary Baffle Plate
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US11905611utility2024
Maintenance Member, Substrate Holding Module, Plating Apparatus, and Maintenance Method
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US11906299utility2024
Plating Apparatus and Film Thickness Measuring Method for Substrate
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