Substrate Support for a Substrate Processing Chamber

FIG. 1 is a top isometric view of a substrate support for a substrate processing chamber, showing our new design.

FIG. 2 is a top plan view thereof.

FIG. 3 is a bottom plan view thereof.

FIG. 4 is a front elevation view thereof.

FIG. 5 is a back elevation view thereof.

FIG. 6 is a left elevation view thereof.

FIG. 7 is a right elevation view thereof; and,

FIG. 8 is an enlarged cross-sectional view taken along line 8 - 8 in FIG. 2 .

The dashed lines in FIGS. 1 - 8 illustrate portions of the article that form no part of the claimed design.