Patents/Inventors

Cheng-hsiung Matthew Tsai

Cupertino, CAUS3 patents

4 Patents

USD10718862025
Substrate Support for a Substrate Processing Chamber
APPLIED MATERIALS, Inc.
0 cites
US120149062024
High Temperature Detachable Very High Frequency (VHF) Electrostatic Chuck (ESC) for PVD Chamber
APPLIED MATERIALS, Inc.
0 cites
US119396662024
Methods and Apparatus for Precleaning and Treating Wafer Surfaces
APPLIED MATERIALS, Inc.
0 cites
US118878782024
Detachable Biasable Electrostatic Chuck for High Temperature Applications
APPLIED MATERIALS, Inc.
0 cites