Furnace for Substrate Processing Apparatus

FIG. 1 is a front, top and left side perspective view of a furnace for substrate processing apparatus showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a right side elevational view thereof;

FIG. 5 is a left side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof; and,

FIG. 8 is a cross-sectional view taken along line 8 - 8 in FIG. 6 .

The broken lines are included for the purpose of illustrating portions of the article that form no part of the claimed design.