Patents/Inventors

Takatomo Yamaguchi

ToyamaJP5 patents

5 Patents

US125403882026
Method of Cleaning Member in Process Container, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Kokusai Electric Corporation
0 cites
USD10707972025
Furnace for Substrate Processing Apparatus
Kokusai Electric Corporation
0 cites
USD10531562024
Furnace for Substrate Processing Apparatus
KOKUSAI ELECTRIC CORPORATION
0 cites
US120538052024
Method of Cleaning Member in Process Container, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
KOKUSAI ELECTRIC CORPORATION
0 cites
US119903592024
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-transitory Computer-readable Recording Medium
Kokusai Electric Corporation
0 cites