Process Chamber Pumping Liner

FIG. 1 is a top front right side view of a process chamber pumping liner according to our design.

FIG. 2 is a top rear right side view thereof.

FIG. 3 is a top rear left side view thereof.

FIG. 4 is a top front left side view thereof.

FIG. 5 is a bottom front right side view thereof.

FIG. 6 is a bottom rear right side view thereof.

FIG. 7 is a bottom rear left side view thereof.

FIG. 8 is a bottom front left side view thereof.

FIG. 9 is a front view thereof.

FIG. 10 is a right side view thereof.

FIG. 11 is a left side view thereof.

FIG. 12 is a rear view thereof.

FIG. 13 is a top view thereof.

FIG. 14 is a bottom view thereof.

FIG. 15 is a cross-sectional view taken along the line 15 - 15 in FIG. 9 .

FIG. 16 is a cross-sectional view taken along the line 16 - 16 in FIG. 9 .

FIG. 17 is a cross-sectional view taken along the line 17 - 17 in FIG. 9 ; and,

FIG. 18 is a cross-sectional view taken along the line 18 - 18 in FIG. 9 .