Shield for Plasma Chambers

FIG. 1 is a perspective view of a shield for plasma chambers showing our new design; FIG. 2 is a side view thereof; FIG. 3 is a top view thereof; FIG. 4 is a bottom view thereof; FIG. 5 is a cross-sectional view taken along lines 5 - 5 in FIG. 4 ; FIG. 6 is an enlarged portion view of encircled portion labeled, “ 6 ,” in FIG. 5 ; FIG. 7 is an enlarged portion view of encircled portion labeled, “ 7 ,” in FIG. 6 ; and, FIG. 8 is an enlarged portion view of encircled portion labeled, “ 8 ,” in FIG. 6 . The dot-dash broken lines shown in FIGS. 5 - 8 illustrate boundary lines of the encircled portion views of FIGS. 6 - 8 and form no part of the claimed design.