Adiabatic Plate for Substrate Processing Appratus

FIG. 1 is a front, top and right side perspective view of an adiabatic plate for substrate processing appratus showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a top plan view thereof;

FIG. 5 is a bottom plan view thereof;

FIG. 6 is a left side elevational view thereof;

FIG. 7 is a right side elevational view thereof; and,

FIG. 8 is a cross sectional view taken along line 8 - 8 in FIG. 2 .