13 Patents
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- US124676892025Furnace Opening Structure, Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
KOKUSAI ELECTRIC CORPORATION
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- US123385292025Substrate Processing Apparatus, Process Vessel, Method of Manufacturing Semiconductor Device and Non-transitory Tangible Medium
Kokusai Electric Corporation
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- USD10638752025Substrate Lifter for Semiconductor Manufacturing Equipment
KOKUSAI ELECTRIC CORPORATION
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- US116859932023Method of Cleaning Reaction Tube, Method of Manufacturing Semiconductor Device, and Substrate Processing Apparatus
SHIN-ETSU QUARTZ PRODUCTS CO., Ltd.
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