Yukinori Aburatani

5 Patents

• US125819022026

  Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-transitory Computer-readable Recording Medium

  KOKUSAI ELECTRIC CORPORATION

  0 cites
• USD11121142026

  Thermal Processing Chamber for a Semiconductor

  KOKUSAI ELECTRIC CORPORATION

  0 cites
• US124513752025

  Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Method of Processing Substrate Support

  Kokusai Electric Corporation

  0 cites
• US121319022024

  Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium

  KOKUSAI ELECTRIC CORPORATION

  0 cites
• US118916972024

  Substrate Processing Apparatus

  Kokusai Electric Corporation

  0 cites