Xue Yang Chang

7 Patents

• US123410482025

  Porous Plug for Electrostatic Chuck Gas Delivery

  APPLIED MATERIALS, Inc.

  0 cites
• USD10662752025

  Baffle for Anti-rotation Process Kit for Substrate Processing Chamber

  APPLIED MATERIALS, Inc.

  0 cites
• US122117342025

  Lift Pin Mechanism

  APPLIED MATERIALS, Inc.

  0 cites
• US121989032025

  Plasma Resistant Arc Preventative Coatings for Manufacturing Equipment Components

  Applied Materials, Inc.

  0 cites
• USD10490672024

  Ring for an Anti-rotation Process Kit for a Substrate Processing Chamber

  APPLIED MATERIALS, Inc.

  0 cites
• US121005762024

  Metal Oxide Preclean Chamber with Improved Selectivity and Flow Conductance

  APPLIED MATERIALS, Inc.

  0 cites
• US120209772024

  Lift Pin Assembly

  APPLIED MATERIALS, Inc.

  0 cites