Patents/Inventors

Tongtong Guo

Beaverton, ORUS12 patents

3 Patents

US126032632026
Apparatuses and Techniques for Cleaning a Multi-station Semiconductor Processing Chamber
Lam Research Corporation
0 cites
US125936412026
Apparatuses for Cleaning a Multi-station Semiconductor Processing Chamber
Lam Research Corporation
0 cites
USD11147512026
Hub with Gas Deflectors
Lam Research Corporation
1 cite