Patents/Inventors

Takamasa Ichino

TokyoJP4 patents

4 Patents

US125923672026
Plasma Processing Apparatus and Manufacturing Method of Wafer Stage for Plasma Processing Apparatus
Hitachi High-tech Corporation
0 cites
US123343162025
Plasma Processing Apparatus and Plasma Processing Method
Hitachi High-tech Corporation
0 cites
US122241572025
Plasma Processing Apparatus and Plasma Processing Method
Hitachi High-tech Corporation
0 cites
USD10052452023
Electrode Cover for a Plasma Processing Apparatus
Hitachi High-tech Corporation
0 cites