Patents/Inventors

Siqing Lu

Santa Clara, CAUS6 patents

7 Patents

US124008332025
Methods and Apparatus for Processing a Substrate
APPLIED MATERIALS, Inc.
0 cites
US121069452024
Plasma Processing Apparatus and Method of Manufacturing Semiconductor Device Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US121005792024
Deposition Ring for Thin Substrate Handling via Edge Clamping
APPLIED MATERIALS, Inc.
0 cites
USD10380492024
Cover Ring for Use in Semiconductor Processing Chamber
APPLIED MATERIALS, Inc.
0 cites
US119963152024
Thin Substrate Handling via Edge Clamping
APPLIED MATERIALS, Inc.
0 cites
US118813752024
Common Substrate and Shadow Ring Lift Apparatus
APPLIED MATERIALS, Inc.
0 cites
US117281982023
Electrostatic Chuck and Wafer Etching Device Including the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites