Patents/Inventors

Shreesha Yogish Rao

Fremont, CAUS3 patents

4 Patents

USD11171202026
Pedestal for a Substrate Processing System
LAM RESEARCH CORPORATION
0 cites
USD11171212026
Pedestal for a Substrate Processing System
LAM RESEARCH CORPORATION
0 cites
US118878782024
Detachable Biasable Electrostatic Chuck for High Temperature Applications
APPLIED MATERIALS, Inc.
0 cites
US117721372023
Reactive Cleaning of Substrate Support
Applied Materials, Inc.
0 cites