Pedestal for a Substrate Processing System

FIG. 1 is a top perspective view of a pedestal for a substrate processing system; FIG. 2 is a bottom perspective view; FIG. 3 is another top perspective view; FIG. 4 is another bottom perspective view; FIG. 5 is a top view; FIG. 6 is a bottom view; FIG. 7 is a front side view; FIG. 8 is a back side view; FIG. 9 is a left side view; FIG. 10 is a right side view; FIG. 11 is an enlarged view of area 11 shown in FIG. 3 ; FIG. 12 is an enlarged view of area 12 shown in FIG. 5 ; FIG. 13 is a perspective view of area 11 shown in FIG. 3 ; FIG. 14 is an enlarged view of area 14 shown in FIG. 5 ; and, FIG. 15 is a cross-sectional view taken along line 15 shown in FIG. 5 . The dash-dash broken lines in the drawings are for the purpose of illustrating portions of the article that form no part of the claimed design. The dash-dot broken lines define the enlarged views and form no part of the claimed design.